Advanced Precision Wet Cleaning Systems

Business Vision

Business Vision

SpeedFam Clean System builds a cleaning process from both hardware and software.
It supports our customers’ products with excellent quality, performance, and productivity.
Even in the current rapidly changing situation, we will continue to take on the challange of realizing cleaning processes that match the needs of our customers.
The most important issue in the manufacturing process is “cleaning”.
We will continue to develop highly reliable cleaning equipment with our outstanding cleaning technology and contribute to precision cleaning with cutting-edge technology.
  • Hard disk cleaning equipment
  • Disk drive parts cleaning equipment
  • Oxide Wafer cleaning equipment
  • Cleaning equipment for semiconductor manufacturing equipment
  • Coating・Curing equipment
  • Various consumable auxiliary materials